Физические основы микротехнологии / И. Броудай, Дж. Мерей ; Пер. с англ. В.А. Володина, В.С. Першенкова и др. ; Под ред. А.В. Шальнова.
Material type:
TextLanguage: Russian Publication details: Москва : Мир, 1985Description: 496 с. ; илSubject(s): Радиотехника. Электроника
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Գրքեր/Books
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Оригинал на англ.: The Physics of Microfabrication / Ivor Brodie, Julius J. Muray- New York : Plenum Press : 1982
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